摘要
通过有限元软件ANSYS仿真,建立了电容传感器的2D模型,计算了电容传感器的敏感场分布。以敏感场的均匀度为评价函数,基于正交试验法得到了较优的传感器结构。
By using ANSYS for formulation and solution of the finite element, a two-dimensional model of capacitance senor was constructed and sensitivity field distribution of capacitance sensor was calculated. The optimal function was presented based on uniformity of sensitivity field distribution. Optimum sensor configuration was obtained by orthogonal test design.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期69-71,共3页
Instrument Technique and Sensor
基金
中国载人航天工程资助项目