声表面波气体传感器发展概况

A Review of SAW Gas Sensor

声表面波气体传感器包括采用敏感膜和结合气相色谱两种方式。比较而言,采用敏感膜的声表面波气体传感器体积小、功耗低,但可检测的气体种类少、灵敏度低、存在交叉干扰问题;声表面波与气相色谱联用的气体分析仪灵敏度高、可检测气体种类多、很好地解决交叉干扰问题,特别适合于复杂大气背景条件下的气体成分分析。文中介绍了两类声表面波气体传感器的发展概况。

two approaches are used for gas sensing of the surface acoustic wave （SAW） based gas sensor, one is using the sensitive film coated onto the SAW device directly, interacting with the target specifics by absorbing; the other way is joint detection using the naked SAW sensor and gas chromatography （GC）. For the first one, small size, low power are observed in the practical application, however, it still suffers from some problems as low sensitivity, less detectable gas types and crossed - interference. It is fortunately that these problems can be solved just right by the joint detection using the naked SAW sensor and GC, espeially, the method is perfect for the gas composition analysis in the complicated atmosphere background. The purpose of this paper is to review the development of the SAW gas sensor using the two detection methods.