波导层不连续的Love波延迟线

A Love Wave Delay Line with Discontinuous Waveguide

Love波传感器的波导层和吸附层通常是不同材料的,一般先在整个器件表面覆盖一层声波导层材料,然后在感应区域对应的波导层上涂镀吸附层,但是这样会增大延迟线的插入损耗。文中设计了一种不连续波导层的Love波延迟线,即在感应区域,吸附层直接镀在压电基片上,同时兼作声波导层;在其他区域覆盖声波导层材料。实验器件制作在ST-90°X石英晶体上,中间感应区域用Au作波导层和吸附层,其他区域采用SU-8光刻胶作声波导层,结果表明,采用这种结构的延迟线可以降低损耗2 dB以上。

Acommon Love sensor consists of different waveguide and adsorption, a guide layer is fabricated on the device and then an absorption layer is plated on the waveguide in the sensitive area;however, thus the insertion loss of delay line will increase. A Love wave delay line with discontinuous guide layer was designed. An absorption layer is directly plated on the substrate as a waveguide the same time and another waveguide is plated on the other area. An experimental device is fabricated on a substrate of ST -90°X quartz;an Au layer is fabricated on the middle area as waveguide and absorption layer; SU- 8 photo-resist is plated on the other area as wave guiding layer. The experimental results showed that the insertion loss designed in the paper was less than common structure delay line more than 2 dB.