基于高精细腔技术的红外吸收光谱型气体传感器

Absorption Spectrum Gas Infrared Sensor Based on High Finesse Cavity

对红外吸收型气体传感器的工作原理进行了分析,设计了一种基于高精细腔技术的红外吸收光谱型气体传感器。并对设计的传感器进行了实验验证,结果显示在通入浓度为20 ppm的H_2S气体时能达到40的信噪比,测量结果准确;在低浓度时测量有一定的偏差。测量的浓度波动小于3 ppm.

This paper analyzed the principle of the absorption spectrum gas infrared sensor and designed an absorption spectrum gas infrared sensor that based on a high finesse cavity. Through the experimental test, a 40 signal-to-noise ratio （SNR） is got when blow 20ppm H2S gas. The metrical concentration will be deviated from the real concentration when the concentration of H2S gas in low level. The fluctuation of the metrical concentration is less than 3 ppm.