一维纳米金属氧化物半导体材料气、湿敏特性的研究

Study on the Gas and Humidity Sensing Properties of One-dimension Nanostructure Metal-oxide Semiconductors

分别采用水热和静电纺丝法制备出一维ZnO、TiO_2、SnO_2纳米材料,并对其气、湿敏特性进行了研究。结果表明一维纳米材料具有非常快的响应恢复速度:水热法制备的花状ZnO纳米棒束由11%RH到95%RH的响应时间约为5 s,恢复时间约为10 s;静电纺丝法制备的掺杂KCl的TiO_2纳米纤维由11%RH到95%RH的响应时间为3 s,恢复时间约为4s;静电纺丝法制备的SnO_2纳米纤维对50 ppm(1 ppm=10^(-6))甲苯气体的响应时间仅为1 s,恢复时间约为5 s.

One-dimension ZnO, TiO2 and SnO2 have been prepared via hydrothermal and electrospinning methods, and their sensing properties to gas and humidity have been investigated. These one-dimension nanomaterials exhibit quick response and recov- ery. The response and recovery times of ZnO nanorods （from 11% RH to 95% RH） prepared by hydrothermal method are 5 and 10 s respectively, the response and recovery times of KCl-doped TiO2 nanofibers （from 11% RH to 95% RH） prepared by electrospinning method are 3 and 4 s respectively, and the response and recovery times of the SnO2 nanofibers prepared by electrospinning method to 50 ppm toluene are about 1 and 5 s respectively.