硅基集成式微型平面纳米级定位平台控制

Control Strategy of Silicon-based Integrated Planar MicroNano-positioning platform

为了解决纳米级定位平台小型化、低能耗、定位精度高的问题,基于结构、驱动和检测一体化的设计理念,研制出了一种硅基片上集成式微型平面纳米级XY定位平台,在建立定位平台数学模型基础上,利用Matlab分析软件对定位平台开环和闭环控制特性进行了比较和仿真分析。在实际控制中,针对硅微机械加工的MEMS器件难以获取精确数学模型的不足,将单神经元算法和传统PID控制算法相结合,设计了具有自动识别被控过程参数并对控制参数进行实时自校正的单神经元自适应PID控制器,依靠平台自身集成的位移传感器实现了定位平台的位置闭环控制,实验结果表明:单神经元自适应PID控制器不仅具有结构简单、鲁棒性好等特点而且能够有效地弥补硅基定位平台由于微机械加工限制造成的机构方面不足,定位平台的动态和稳态性能良好,最大工作行程±10μm,稳定时间小于2.5 ms,重复定位精度优于24.9 nm.

In order to realize nano-positioning plaffoim miniaturiation, low power and high positioning accuracy, a silicon- based integrated planar micronano-positionig x-stage, based on the design thin king of the integration of structure, actuation and sensor-feedback was designed and fabricated for application in nanometer-scale operation and nanometrie positioning precision. After the fabricated XY-stage mathematic model built, comprehensive open-loop and closed-loop eontrolcharacteristics were simulated and compared in full detail using analysis tools of Matlab software. Concernin the inaccurate model of the fabricated XY-stage due to mieromaehining fabrication imperfect, in practice, a single neuron adaptive PID controller, characterized by a simple structure, strong robustness and control parameters self-adjust varying with the external condition, was proposed and designed. The experimental results verifies that the controller is more suitable for the silicon-based integrated micro XY-stage, which can compensage for the inconsistence of the structural dimensions due to the limitation of the micromachining real-time, under which a ±10μm singleaxis displacement is measured, the settling time is less than 2. 5 ms and the repeatability error is better than ±24.9 nm. The presented control scheme is simple to implement in practical application