一种新型的硅谐振式微传感器频率特性测试系统

A New Frequency Characteristics Test System for Silicon Micromachined Resonant Sensor

针对硅微机械谐振式压力传感器,设计了一种新型的专用频率特性测试系统,采用直接相关原理进行微弱信号检测,简化了模拟电路设计;提出了分时正交的检测方法解算被测样件的幅频、相频特性。实验结果表明:系统实现了对硅微机械谐振式压力传感器的幅频和相频特性的同时测量,实测结果与理论值符合,不仅给出了闭环设计的必要参数,同时为加工工艺的改进提供了重要信息。

A new frequency characteristics test system for silicon micro-machined resonant pressure sensor was presented in this paper. Direct correlation principle was applied for weak signal detection, simplifying the analog circuits. A kind of time-sharing, quadrature-phase strategy was proposed to obtain amplitude-frequency and phase-frequency characteristics respectively. The series experimental results demonstrated that, this system fulfilled the test for complete frequency characteristics of silicon micromachined resonant sensors. Experimental results are consistent with the theoretical ones, providing essential parameters for closed-loop design and important information for fabrication technology improvement.