谐振式硅微结构传感器综合测试分析仪

Integrated Testing Analyzer for the Resonant Silicon Microstructure Sensor

提出了一种谐振式硅微结构传感器综合测试分析仪器,用于微机械谐振式传感器各关键环节的测试、分析与评估。主要解决测试对象特性模型、微弱信号处理、测试数据分析评估等问题,并将有关理论和技术集成为一台模块化的、具一定开放性的测试仪器。该测试仪器对于深入掌握谐振式硅微结构传感器谐振子和闭环系统的特性和优化方法,实现高性能微传感器具有重要意义。

An integrated testing analyzer for the resonant silicon microstructure sensor was presented. The analyzer is applied to the testing, analysis and evaluation of the key links of the micromachined resonant sensor, and is mainly for establishment of the testing object model, weak signal processing and evaluation of the testing data. The modularized and opening testing instrument is integrated with the related theories and technologies. This testing instrument has important significance for thoroughly grasping the characteristics and the optimization method for the resonantor and the closed - loop system of the resonant silicon microstructure sensor, and is essential to develope the high-performance microsensor.