硅电容差压传感器性能测试中PLC对压力的控制

Pressure Control in the Course of Si-capacitive Pressure Sensor Test Based on PLC

原有硅电容差压传感器性能测试中压力控制方式完全采用人为操作,不仅耗时耗力,而且对性能测试的精度也存在无法估计的测试误差,为了避免这些弊端,提出了新的测试方案,该方案采用PLC控制正、负腔管路中高压电磁阀和压力传感器的方式来实现对硅电容差压传感器性能测试过程中正、负腔管路的加卸压。这样便大大地节省了人力和时间,更加有效地提高了硅电容差压传感器性能测试效率。

The primary manual pressure control in the course of Si-capacitive differential pressure sensor test, not only is timeconsuming and hard sledding, but also has the inestimable test error to the accuracy of the performance test. In order to avoid the disadvantage, the new design was proposed, which can fulfill adding and discharging pressure in the positive and negative pipeline in the course of Si-capacitive differential pressure sensor test through control the high pressure electromagnetic valve and pressure sensor in the positive and negative pipeline by PLC. It can save time and manpower, and improve the performance test efficiency of the Si-eapacitive differential pressure sensor more effectively.