摘要
基于MEMS加工和模块化封装来制作用于碰撞冲击测量的加速度传感器。该传感器采用新型三梁-质量块敏感结构,在提高灵敏度的同时拓宽了频带范围。通过压阻效应形成惠斯通电桥,在500 g的量程下,灵敏度达到0.3 mV/g/5 V,固有频率15k Hz.传感器贴装在PCB板上,由经济实用的放大电路进行处理,可以实现两维的加速度测量,电压输出1～4 V,带宽500 Hz.传感器在车辆运输等实际环境下进行了试用,性能可靠稳定,具有良好的实用化前景。
A silicon micromachined acceleration sensor with modularized packaging was developed for crash and shock testing. The sensor adopted a three-beam mass structure to achieve both high sensitivity and broad frequency response. By taking use of the Wheatstone bridge which based on piezoresistive effect, the sensitivity and resonance frequency of the sensor reached O. 3 mV/g/5 V and 15 kHz, respectively within the full scale range of 500 g. Being mounted on a PCB board and processed with economical and practical signal amplification circuits, the sensor could measure two-axis acceleration, with an output voltage of 1 4 V and a system bandwidth of 500 Hz. The performance of the sensor is reliable and stable in the application of vehicle transporting, and promises a good potential market.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第B11期287-290,共4页
Instrument Technique and Sensor
关键词
加速度传感器
压阻
碰撞
实用化
acceleration sensor
piezoresistive
crash
application
