一种新型固支结构石英音叉陀螺的设计

Design of Quartz Tuning Fork Gyro with New Mount Structure

石英音叉陀螺的固支结构对陀螺器件的性能影响很大。提出一种新型固支结构的石英音叉陀螺,把固支结构的支撑梁设计在元件拾取运动零位移线处,目的在于提高陀螺对外界振动和温度变化的抗干扰能力,从而改善零位稳定性。运用ANSYS软件对新结构做仿真验证,结果表明新结构在元件灵敏度、抗振动等重要性能上都有一定提高。新结构同时能缩短元件制造流程,更易工程实现。

The mount structure have a strong effect on the performance of the quartz tuning fork gyro. The paper introduced a quartz tuning fork with a new mount structure, pickup mode nodal line positioned at support bridge and center mount, in order to weaken effect of external vibration or temperature change and improve the gyro＇ s bias stability. The new structure was simulated with ANSYS, it was showed that the sensitivity of the new structure was improved and resisted external perturbation well, The new structure fork also could be manufactured more easily by reducing process such as dry etch.