摘要
介绍了一种微小力值测量系统的设计方法。系统采用了自主设计的传感器结构,充分利用了圆柱形电容传感器量程大、线性好、边缘效应小等特点,通过高精度直线轴承保证了运动的同轴度,又利用增加屏蔽结构等方法用来消除寄生电容的干扰。检测电路基于新型高精度、集成式电容数字转换器AD7747与单片机,实现了对电容变化量dC的精确测量。实验结果表明:该方法为10-5N以下的微小力值测量提供了一种有效的解决方案。
A design method of measuring system for micro-force value is introduced. Self-designed sensor structure is used to make full use of a cylindrical capacitance sensor range,linear, the edge of the characteristics of small effect and so on, a straight line is used through the high-precision bearings to ensure the movement of coaxial, and other methods of shield capacitance are used to eliminate the interference. Detection circuit through the new high-precision,integrated capacitance-to-digital converter and the AD7747 single-chip processor are used to achieve accurate measurement of dC changes in the volume while reducing the cost of the system. The experiments conclude that the method for the following 10^-5N power source and measuring the value provides an effective solution.
出处
《传感器与微系统》
CSCD
北大核心
2009年第11期8-11,共4页
Transducer and Microsystem Technologies
基金
天津市科委2009年应用基础及前沿技术研究计划项目(09JCYBJC05200)
关键词
微小力值
电容变化量
位移变化量
micro-force value
capacitance change
displacement change
