纳米、亚微米的超窄脉宽微细电化学加工

Nanometer and Submicron Electrochemical Micromachining Using Ultra-Short Voltage Pulses

通过分析超窄脉冲实现纳米、亚微米级精度微细电解加工的机理和特点,说明脉冲电源的脉冲宽度减小至纳秒时,可将提高电解加工精度的方法综合运用,如小间隙电解加工、低浓度电解液、加工间隙的实时检测和调整控制等,从而增强电化学反应的定域蚀除能力,减小两电极的极间间隙,显著提高加工精度。构建了微细电化学加工系统,包括微细加工机床、纳秒脉冲电源、电解液循环系统、运动控制部分和加工检测部分,进行了微细加工试验。这种方法在微细成形加工、微小孔加工等方面已经取得了很好的应用效果,与其他特种微细加工技术相比具有一定的优势,在微米、纳米制造领域有着很大的发展潜能。

The principle and characteristic of nanometer and submicron micromachining with ultra-short voltage pulses electrochemical reactions were investigated.While the pulse duration of potentiostat is decreased to nanosecond,some improving precision measures,for example small gap electrochemical,lower concentration electrolyte,the real-time monitored and automated adjustment of the machining gap,can be synthetically employed.Therefore the gap between the electrodes is reduced,and the localization and accuracy of the machining can be significantly enhanced.The electrochemical machining system was constructed.It consists of micro-machining equipment,nanosecond pulse power supply,electrolyte circulating system,movement control component and process monitoring component.The electrochemical micromachining experiment was carried out on this system.This method has been perfectly applied to micro-molding and micro-hole machining.Compared with other special micromachining technologies,it has considerable advantages and the large development potentials in micro/nano-manufacture field.