MEMS陀螺中折叠梁的建模与仿真

Design and Simulate of Folded Cantilever in MEMS Gyroscope

针对MEMS陀螺中常见的折叠梁结构,建立了折叠梁的理论模型,并在SABER平台上建立了其系统级模型.进而将两根折叠梁相连的模型用于MEMS陀螺的设计与仿真,对其进行频域和时域分析.利用基于ANSYS的有限元仿真结果对模型进行了有效性验证,分析了折叠梁的尺寸参数变化对陀螺谐振频率的影响.仿真结果表明,折叠梁的系统级模型与ANSYS仿真结果的误差小于5%,仿真时间仅200 s,可以在确保仿真精度的前提下,满足MEMS器件快速设计的要求.

Aiming at folded cantilever in the application of MEMS gyroscope, a mathematical model is built and the system-level model is accomplished by SABER platform. The frequency and time domains are simulated for two folded cantilevers in MEMS gyroscope. The model is tested by finite element simulation. Influence of the folded cantilever parameters on the gyroscope resonance frequency is analyzed. Simulated results show that system-level model of folded cantilever has a maximum error less than 5% and a short simulated time of about 200s. It can be applied for MEMS devices to improve the design efficiency while maintaining a high computing accuracy.