扩散真空泵性能自动测试系统的研制

Development of an automatic testing system for diffusion pump performance

本文介绍了一套新研制的扩散真空泵性能的自动测试系统。该系统可以按照国家标准规定的方法自动检测扩散真空泵的极限压力和抽速。系统利用自主开发的光电液位检测方法和元件实现滴管液位的自动读取和记时;利用步进电机驱动针阀实现气体流量和测试罩内压力的自动调节;使用上位PC机和下位单片机的双级控制系统实现对整个测试系统和测试过程的自动控制。

A newly developed automatic testing system for diffusion pump performance is described. The system can automatically test the uhimate pressure and pumping speed of a diffusion pump in accordance with the National Standards. Taking advantages of the photoelectric liquid level testing method and relevant elements we developed, the system can automatically test and read the liquid level in dropper with rising time recorded. A stepping motor is used to actuate a needle valve so as to implement the autoregulation of gas flowrate and the pressure in testing hood. A two-stage autocontrol system comprising an upper PC and a lower chip computer is thus provided to monitor the testing system and the testing process.