摘要
本文以C2H2为碳源,Ar气为辅助气体,采用新型离子束源和磁控溅射源的混合技术在缝纫机针杆上成功制备了具有不同过渡层的类金刚石薄膜,并表征了薄膜的表面形貌,测量了其硬度、结合力、摩擦系数,划痕法的结果表明,增加过渡层后薄膜的结合状况得到明显改善,DLC膜的硬度也得到了提高,摩擦磨损实验结果可以看出样品的摩擦系数均在0.1以下,可以极大地改善不锈钢针杆的摩擦性能。
DLC films with different buffer layers were succesfully deposited on the needle surface of sewing machine by using C2H2 gas as carbon source and Ar as auxiliary gas, with a hybrid technology of new ion beam source and magnetron sputtering process. The surface morphology, hardness, bonding force and friction coefficient of the DLC films were all characterized. The results of the scratching method showed that the surface adhesion of the films is obviously improved by buffer layers as well as the hardness. Tribological test results showed that the friction coefficients of the film samples are all below 0.1, ie., the tribological properties of the stainless steel sewing needle are greatly improved.
出处
《真空》
CAS
北大核心
2009年第6期40-42,共3页
Vacuum
关键词
过渡层
结合力
硬度
摩擦学性能
buffer layer
adhesion
hardness
tribological properties
