摘要
采用有限元法分析了声表面波换能器电极上的激励问题。从声场波动方程、麦克斯韦方程以及压电本构方程出发,利用哈密顿原理,推导了在压电介质中声表面波有限元方程,然后采用Newmark法对有限元方程进行时域变换。分析了换能器电极上的静态电荷分布和动态电荷分布。对压电介质中声表面波振动振幅进行计算并分析了质点振动振幅随深度的变化情况。
The relationship between surface acoustic wave （SAW） and voltage excitation is analyzed with the finite element method （FEM）. Starting from the acoustic field wave equations, Maxwell equations and piezoelectric constitutive equations, the finite element equations for interdigital transducers are established with Hamilton principle, and then transformed into time-domain with Newmark method. The static charge distribution and the dynamic charge distribution on electrodes are analyzed. The SAW vibration amplitude of the interdigital transducers is calculated and its variation with depth is also analyzed.
出处
《声学技术》
CSCD
2009年第5期678-681,共4页
Technical Acoustics
基金
安徽省高校省级自然科学研究项目(KJ2008B027)
关键词
声表面波
有限元法
换能器
电荷分布
surface acoustic wave（SAW）
finite element method（FEM）
transducers
charge distribution
