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柔性ITO衬底上铜酞菁薄膜有序生长的X射线衍射研究 被引量:2

X-ray diffraction investigations of well-ordered copper phthalocyanine films deposited on flexible ITO substrate
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摘要 采用石英晶体微天平实时监测薄膜生长速率,通过控制衬底温度与薄膜生长速率,在柔性ITO导电衬底上真空蒸发沉积了铜酞菁薄膜。X射线衍射分析表明,适当提高衬底温度与薄膜生长速率,可促进薄膜的有序生长。当衬底温度为90℃,生长速率为10nm/min时,薄膜的有序度最高,薄膜晶型呈(相和(200)晶面。 Through controlling substrate temperature and growth rate detected by quartz crystal microbalance measurement,CuPc films were deposited on flexible ITO substrate.X-ray diffraction investigation shown that the growth of CuPc films were strongly affected by substrate temperature and growth rate.Well-ordered CuPc film could be deposited at substrate temperature 90℃ and growth rate 10nm/min.Crystal structure of the as-prepared CuPc film was existed as(phase and(200) plane.
出处 《化工新型材料》 CAS CSCD 北大核心 2009年第11期40-42,共3页 New Chemical Materials
基金 国家自然科学基金资助项目(20876182 20576141) 广东省自然科学基金资助项目(7003705)
关键词 铜酞菁 X射线衍射 柔性衬底 真空蒸发沉积 有序薄膜 copper phthalocyanine X-ray diffraction flexible substrate vacuum evaporation deposition well-ordered film
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参考文献11

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同被引文献26

  • 1何智兵,韩高荣,吴卫东,唐永建.真空热蒸发酞菁铜(CuPc)薄膜的结构及光学、电学性能研究[J].真空科学与技术学报,2005,25(4):278-282. 被引量:12
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