摘要
本文对微电子固体薄膜结构，以及影响薄膜电阻导电性和稳定性的因素进行了研究和分析。实验数据和电路应用实例表明：Cr－Si薄膜电阻是一种良好的材料，它具有高电阻率、低温度漂移系数、高稳定性、无寄生效应、高匹配精度等特性。
This paper study and analysis microelectronic solid film construction and factor that effect the film resistor conductivity and constantity. Test data and the sample of application circuit show:the Cr-Si film resistor is a good material,it have high resistivity, low temepreture drift factor, high constantivity, no parasitic effect,high mate accurate specific property.
出处
《微处理机》
1998年第4期15-17,共3页
Microprocessors
