摘要
When a force is directly applied to the propagation surface of surface acoustic wave （SAW）, the velocity of SAW is varied. Then the loading force can be introduced by effective material coefficients and the velocity of SAW is calculated via the general Green＇s Function. The experimental results accord with the above numerical calculation very well. It also shows that the propagation loss will increase with the force load, and the velocity variation of SAW is proportional to the force loaded to the surfaces of SAW resonators, which has a high sensitivity about 5.97 m/s·N.
When a force is directly applied to the propagation surface of surface acoustic wave （SAW）, the velocity of SAW is varied. Then the loading force can be introduced by effective material coefficients and the velocity of SAW is calculated via the general Green＇s Function. The experimental results accord with the above numerical calculation very well. It also shows that the propagation loss will increase with the force load, and the velocity variation of SAW is proportional to the force loaded to the surfaces of SAW resonators, which has a high sensitivity about 5.97 m/s·N.
基金
supported by the Joint Fund of National Natural Science Foundation of China and the Chinese Academy of Engineering Physics(No.10776039)
the National 863 Plan(2007AA12Z132)
