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压电陶瓷驱动的超精密快刀伺服系统的设计与研制 被引量:19

Design and Development of an Ultra-precision Fast Tool Servo System Driven by Piezoelectric Ceramic
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摘要 以压电陶瓷和柔性铰链作为驱动平台,系统地研究了面向快速车削加工的刀具伺服装置的设计、运动建模与研制方法。测试结果表明,研制的快刀伺服装置定位误差为7.7nm,重复定位误差为4.4nm,线性度优于0.145%,运动距离为39.0μm时响应频率达到了218Hz,能够满足复杂面形零件或结构的超精密快速车削加工要求,为以后该快刀系统在实际加工中更广范围的应用研究打下了基础。 Based on piezoelectric actuator and flexure hinge platform, the design, morion modeling and development of FTS device were studied systematically herein. The testing results indicate that the positioning errors are less than 7.7nm, the repetitive positioning error is less than 4.4nm,the linearity precedes 0. 145% and the frequency response precedes 218Hz at 39.0μm travel range for self--developed FTS system, and these performances can completely satisfy the machining requirements for the elements or structures with complex form. A good foundation for future use was built in real manufacture.
出处 《中国机械工程》 EI CAS CSCD 北大核心 2009年第22期2717-2721,共5页 China Mechanical Engineering
基金 国家自然科学基金资助重点项目(50735007)
关键词 快刀伺服 复杂面形 压电陶瓷 柔性铰链 fast tool servo (FTS) complex form piezoelectric ceramic (PZT) flexure hinge
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