石英微加工技术在微陀螺研制中的应用(英文)

Application of Quartz Micromachining to Realization of Micro-gyro

利用集成电路演变而来的微加工技术研制的微型陀螺,便于批量生产。其成本低,质量轻,抗冲击。该文介绍了石英微陀螺的基本结构和工作原理,叙述了石英晶体化学各向异性刻蚀的工作机理和加工方法。利用化学各向异性刻蚀加工技术,研制出微型陀螺样机,其主要技术指标:零偏稳定性为15(°)/h,线性度为0.05% ,分辨率为0.008 (°)/s,带宽为50Hz。

Micromachined gyro was made by using technologies directly derived from integrated circuit fabrication,it is easily to be mass-produced. It has such advantages as low costs,lightweight,resist high shock. In this paper,the basic structure and operation of quartz micromachined gyro are discussed. The mechanism and processing method of chemical anisotropic etching for quartz are described. We have made quartz micro-gyros with the help of chemical etching technology. The sample′s main specifications are as following： Bias stability is 15 （°）/h,linearity is 0.05% ,resolution is 0.008 （°）/s,Band width is 50 Hz.