压电微悬臂梁共振频率的检测系统

Resonance Frequency Detection of Piezoelectric Micro-cantilever

介绍了一种压电微悬臂梁共振频率检测系统。压电材料沉积在微悬臂梁上,在压电层的上下电极之间施加交变电压使其振动,当微悬臂梁的振动频率等于它的固有频率时,发生共振,此时微悬臂梁的振幅最大。结合所设计的激励电路以及微悬臂梁共振频率检测电路,对压电微悬臂梁进行了检测实验。实验结果表明,放大电路能够检测出压电微臂梁的共振频率,并且压电微悬臂梁达到共振时,共振频率附近振幅远大于其他频率对应的振幅,振幅最大值接近600nm。

Resonance frequency detection system of piezoelectric micro-cantilever was presented,on which piezoelectric film was deposited.The alternating current was put on the film to make it vibrate.When the vibrate frequency was equal to its inherent frequency,resonance happened,and the amplitude of piezoelectric micro-cantilever reached the maximal.A series of experiments had been done by the driving power and detecting power designed by ourselves.The experiments showed that resonance frequency could be detected by the amplifier,and the amplitude of the resonance frequency was obviously bigger than the amplitude of the other frequency.The maximal amplitude was about 600 nm.