摘要
提出了一种新的微位移测量的方法,该方法采用多次反射光学放大法对微小位移进行放大,用线阵CCD实现对物体位移前后光斑位置的采集,通过计算机将数据处理即可得到微小位移量。理论分析表明,该方案的测量精度可以达到2.8nm。
A new method for measuring the micro-displacement is proposed in the paper.The system is based on the optical lever to enlarge the micro-displacement,and then location of the light spot is measured using linear CCD.Micro-displacement can be get after data processed and this system s therretic resolving power is 2.8 nm.
出处
《机电产品开发与创新》
2009年第6期156-157,145,共3页
Development & Innovation of Machinery & Electrical Products
关键词
微位移
光学放大
线阵CCD
高斯滤波
micro-displacement
optical enlarge
linear CCD
gaussian filtering
