摘要
本文首先介绍了压电驱动二维微动工作台定位补偿系统的结构特点，然后对微动工作台的性能进行了分析，给出了性能实测结果，最后研究了系统在超精密定位补偿方面的应用。
The feature of positioning and compensating system based on piezodriven two dimension micro displacement worktable was introduced in this paper firstly,then the performance of precision worktable was analyzed,the experimental results were given,finally the application of system in ultraprecision positioning and compensating was studied.
出处
《宇航学报》
EI
CAS
CSCD
北大核心
1998年第4期28-31,共4页
Journal of Astronautics
基金
国家自然科学基金
