摘要
描写了一种新型的CCD摄像头一计算机系统,它可以在镀膜基板激光测温的过程中跟踪光斑中心,从而测出移过光斑中心的干涉条纹数,达到镀膜基板激光测温自动化的目的。
The article describes a new CCD camera-computer system,which can track the center of the light spot and count the number of fringes passing the center constantly' So we can measure the substrate temperature by laser automatically'
出处
《光学仪器》
1998年第5期28-32,共5页
Optical Instruments