改进型宽束冷阴极离子源配套电源研制

The Study of Bipolar Asymmetric Pulse Power

离子束辅助镀膜沉积过程中,绝缘薄膜上的电荷积累效应严重影响了薄膜质量,通过对宽束冷阴极离子源的改进,引出极采用交变电压分时引出电子和离子,以消除薄膜表面的电荷积累现象。引出极电源由两个直流电源模块、4只IGBT组成的全桥逆变模块和主控制器组成,通过电压幅值可调的直流模块向全桥逆变模块提供电压,调整全桥逆变模块触发脉冲的宽度,即可生成电压幅值和占空比可调的交变方波电压,实验验证在离子源引出极加交变方波电压可使离子和电子在薄膜表面达到很好的中和效果。

During the process that ion beam assists filming sediment, the film quality is affected badly by the charge accumulation on the insulation film, through the improvement of broad-beam cold cathode ion source, the electron and ion is leaded out time-shared when leading-out polar uses alternation voltage to eliminate the charge accumulation phenomenon on film surface. The leading-out polar electric power source is composed by two direct current electric power sources, the inversion module constituted of four IBGT, the main controller, the width of inversion module trigger pulse is adjusted through supplying electronic pressure to inversion module by the direct current module whose voltage value can be adjusted to generate the alternation square wave voltage whose voltage value and duty radio can be adjusted, in the experiment, the conclusion that adding alternation square wave voltage to the ion source leading-out polar can make ion and electron reach all-right neutralization effect on the film surface is tested and verified.