摘要
以eM-Plant系统仿真软件为工具,构建出一个虚拟的双臂自动组合装置。该装置克服了传统解析法的缺点,通过仿真模型来描述与分析半导体加工装置的调度问题,是研究人员研究自动组合装置控制问题的有效手段,也是半导体制造工程师验证生产调度的可行性的仿真平台。
A virtual dual-arm cluster tool for semiconductor fabrication was developed by using eM-Plant.It is a new method based on simulation which can solve the problem that the feasibility of scheduling and control policy cannot be checked analytically because of the wafer residency constraints.Thus,it provides an effective tool for researchers to study the control problem of cluster tools,and check feasibility of scheduling for engineers.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2009年第23期2871-2875,共5页
China Mechanical Engineering
基金
国家自然科学基金资助项目(60574066)
