富Ti-TiNi薄膜的热循环效应

Thermal Cycling Effect in Ti rich TiNi Films

采用电阻法研究溅射ＴｉＮｉ薄膜的热处理效应．实验结果表明，溅射ＴｉＮｉ薄膜的热循环效应与块状ＴｉＮｉ合金相比有所不同，随热循环次数增加，ＴｉＮｉ薄膜的马氏体相变点Ｍｓ显著升高；Ｒ－Ｔ曲线的形状发生改变；但Ｍｆ，Ａｓ，Ａｆ。

The effect of thermal cycling on the sputtered TiNi films was studied by means of electrical resistance. The results show that the effect of thermal cycling of Ti rich TiNi films is different from that of bulk TiNi alloy. With increasing cycling times of thermal cycling, the martensitic phase transformation temperature M s rises obviously, the shape of R T curves changs, but M f, A s, A f, T R and T ′ R almost remain constantly.