椭圆偏振光谱数据处理的分段多项式法

Data Analysis for Spectroscopic Ellipsometry with Piecewise Polynomial Method

采用分段多项式拟合的方法处理椭圆偏振光谱测试数据，可以同时得到样品的厚度和光学常数谱．２个计算实例，①为ＳｉＯ２薄膜，②为新型的掺镧的锆钛酸铅（ＰＬＺＴ）非晶类铁电薄膜．该方法精度高，具有较好的通用性．

The sample thickness and its optical contant spectra can be obtained simultaneously by fitting the measured spectroscopic ellipsometry data with piecewise polynomials.Two illustrative examples(SiO 2 film,lead lanthanum zirconate titanate(PLZT) amorphous ferroelectric like thin film) are presented to demonstrate that this technique is very precise and can be used generally.