摘要
多孔硅(PS)与多孔硅微腔晶体(PSM)作为新型功能材料,其独特的光学特性、微电子相容性、滤过性、纳米微孔生长可控性及大的比表面积为生物信号传感提供了一个较为理想的平台,已制备成多种生物传感器应用于血液,细菌,病毒,DNA等的快速检测中。在分析了PS与PSM的结构和性能的基础上,重点介绍了PS与PSM生物传感器的研究现状,并提出开发微型芯片、集成器件和市场化产品将是PS与PSM生物传感器的发展趋势。
As new functional materials,porous silicon (PS)and porous silicon microcavity (PSM)have performance in biosensors fabrication for many good properties, such as light-induced t perfect , microelectronics compatibility, filtration ability, controllable growth of nano-micro holes. Many biosensors based on porous silicon and porous silicon microcavity have been fabricated, and applied in rapid detections of blood, bacteria,virus,DNA, etc. The structure and properties of PS and PSM are analyzed. The research status of the biosensors based on PS and PSM are introduced. At the same time, it is believed that the exploiting micro-chip, integration and product-forming are expected to be the development trend.
出处
《传感器与微系统》
CSCD
北大核心
2009年第12期1-4,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(20875062)
关键词
生物传感器
多孔硅
多孔硅微腔晶体
biosensor
porous silicon(PS)
porous silicon microcavity(PSM)