微拉伸系统中微弹簧力学传感器的研究

RESEARCH OF MICRO-SPRINGS FORCE SENSOR FOR MICRO-TENSILE SYSTEM

研究应用于薄膜力学微拉伸测试系统的微弹簧力传感器。在单轴薄膜微拉伸系统的基础上,通过有限元模拟分析,研究以S型弹簧为结构基础的微弹簧力传感器。根据模拟结果,利用高精度线切割和UV-LIGA(Ultraviolet Lithographie GalVanoformung Abformung)技术制备出微弹簧力传感器,并在自制装置上进行标定。标定结果表明,由负胶工艺制备的自由式微弹簧力传感器有良好的线性,而且与Ansys模拟的弹性系数结果一致,为微拉伸测试系统提供良好的条件。

The micro-spring force sensor which is applied to micro-tensile system for measuring mechanical properties of thin films is presented. The coefficient of elasticity of micro-spring force sensor is analyzed by Ansys, and micro-spring force sensor is fabricated by linear cutting and UV-LIGA （Ultraviolet Lithographic GalVanoformung Abformung） technology based on analyzed results. The force sensor is calibrated in the special device. The calibrated results show that the force sensor has good consistency with the Ansys result, and it indicates that the force sensor by SU-8 technology have good linearity with large deformation. So the micro-spring force sensor could assure the accuracy of tensile force in the micro-tensile system.