摘要
Multi-beam ultra-fast laser parallel microprocessing using spatial light modulation is demonstrated in this paper.Diffractive multi-beam patterns are generated with a spatial light modulator(SLM),which is driven by computer generated holograms(CGHs).The CGHs calculated by appropriate algorithms are displayed on the SLM to split an input laser beam to a number of beamlets and digitally manipulate their positions and intensity.The undesired damage by the energetic zero order beam can be avoided by either installing a 4f optical system to block the zero order at the Fourier plane or adding a Fresnel zone lens on the CGH to defocus the zero order at the processing plane.The surface ablation of materials using multi-beam patterns synchronised with a scanning galvanometer system shows flexible and high throughput parallel processing.By tightly focusing the diffractive beams with an objective into transparent materials,high speed dynamic femto-second laser two-dimensional(2D) and three-dimensional(3D) internal structuring is also presented.The results demonstrate the high precision micro-processing with higher efficiency,showing the potential for ultra-fast laser parallel processing in real industrial applications.
Multi-beam ultra-fast laser parallel microprocessing using spatial light modulation is demonstrated in this paper. Diffractive multi-beam patterns are generated with a spatial light modulator （SLM）,which is driven by computer generated holograms （CGHs）. The CGHs calculated by appropriate algorithms are displayed on the SLM to split an input laser beam to a number of beamlets and digitally manipulate their positions and intensity. The undesired damage by the energetic zero order beam can be avoided by either installing a 4f optical system to block the zero order at the Fourier plane or adding a Fresnel zone lens on the CGH to defocus the zero order at the processing plane. The surface ablation of materials using multi-beam patterns synchronised with a scanning galvanometer system shows flexible and high throughput parallel processing. By tightly focusing the diffractive beams with an objective into transparent materials,high speed dynamic femto-second laser two-dimensional （2D） and three-dimensional （3D） internal structuring is also presented. The results demonstrate the high precision micro-processing with higher efficiency,showing the potential for ultra-fast laser parallel processing in real industrial applications.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2009年第12期3093-3115,共23页
Chinese Journal of Lasers
关键词
多波束超快速激光
数字处理
光学系统
傅里叶平面
femto-second laser
spatial light modulator （SLM）
computer generated holograms （CGH）.
