摘要
采用微细加工技术在127.8°YX型LiNbO3压电基底上制造出周期为400μm的铜叉指结构的微型雾化器。该雾化器利用声表面波(SAW)对液滴表面产生的表面张力波作用实现对液滴的雾化。对叉指结构(IDT)周期长度的确定和器件的制作工艺进行了详细说明。利用对液滴驱动速度的测定得出了该雾化器的实际中心频率,并指出实际中心频率与理论值存在差异的原因。得出雾化微粒直径与叉指结构周期之间的关系,并计算得出在施加驱动频率为10.1MHz、功率为24W的电信号时,其雾化颗粒直径为2.61μm,雾化速度达到了1μL/s。
The micro-atomizer with a copper interdigital transducer （IDT） was fabricated on a 127.8°YX-type LiNbO3 substrate by micro-processing technology. The droplet can be atomized by the micro-atomizer through the capillary wave induced by the surface acoustic wave （SAW）. The cycle length of the IDT and the production process of the devices were described in detail. The actual center frequency of the atomizer was obtained by determination of the droplet speed, and the reasons of the difference between the theoretical frequency and the actual frequency were pointed out. The relationship between the diameter of the particle and the cycle length of the IDT was gotten. The results show that the diameter of the particle is 2.61 μm and the speed of the atomization is 1 μL/s with the applied frequency of 10.1 MHz and the power of 24 W.
出处
《微纳电子技术》
CAS
北大核心
2009年第12期726-729,共4页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(60777016)
上海市浦江人才计划资助项目(09PJ1406200)
科技部国际合作项目(2009DFB10330)
航空重点实验室基金资助项目(20080857002)
关键词
微细加工技术
雾化器
声表面波
叉指换能器
微粒
micro-processing technology
atomizer
surface acoustic wave
interdigital transducer
particle
