摘要
为实现高精度量块表面粗糙度的快速、无损伤、自动化检测,研制了一套基于干涉图像处理的表面粗糙度检测系统。系统由干涉显微镜、数字CCD摄像头和计算机组成。待测量块表面经干涉显微镜所成的干涉图像由数字CCD摄像头采集并传输到计算机中,利用数字图像处理技术,对干涉条纹的边缘和中线进行提取,计算出量块表面粗糙度评定参数。提供了实测结果和测量不确定度评定,由测量重复性引起的不确定度为0.9nm,总的展伸不确定度为3nm。
In order to realize quick, nondestructive and automatic measurement of the surface roughness of high accuracy gauge block, a surface roughness measurement system based on interference image processing is studied out. The system consists of an interference microscope, a digital CCD video camera and a computer. The gauge block surface under test is imaged by the interference microscope. The interference image is acquired and transmitted to the computer by the digital CCD video camera, Digital image processing technology is used to extract the edge contour line and midline of the interference dark fringe. Then the surface roughness assess parameters are calculated out. The test results and the evaluation of uncertainty in the measurement are presented. The uncertainty resulted from measurement repeatability is about 0.9 nm and the extended uncertainty in the measurement is about 3 nm.
出处
《激光与光电子学进展》
CSCD
北大核心
2009年第12期87-90,共4页
Laser & Optoelectronics Progress
基金
武昌船舶重工有限责任公司计量公司资助课题
关键词
测量与计量
光学测量
图像处理
表面粗糙度
measurement and metrology
optical measurement
image processing
surface roughness
