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单个浮置场限环终端结构击穿电压模型 被引量:1

Breakdown Voltage Model of Single Floating Field Ring Termination
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摘要 基于B.J.Baliga的击穿电压理论,通过求解双边突变圆柱结的泊松方程,提出了单个浮置场限环终端结构的击穿电压解析模型。该模型计算结果与模拟结果的误差在±7%之内,具有精度高、应用范围广等特点,可以帮助设计者初步确定浮置场限环注入窗口大小及与主结的间距等关键参数。 An analytical breakdown voltage model of single floating field ring termination was proposed base on Bo J. Baliga's theory of breakdown voltage and Possion's Equatioru The error between calculation and simulation results are within ±7%. The model can help designer define key parameters, such as diffusion area of the floating field ring and pitch-width between the main junctions and the floating field ring. The model features high precision and wide application.
出处 《微电子学》 CAS CSCD 北大核心 2009年第6期848-851,856,共5页 Microelectronics
基金 江苏省自然科学基金资助项目(BK2008287) 东南大学国家自然科学基金预研支持项目(XJ2008312)
关键词 浮置场限环 击穿电压模型 终端结构 Floating field ring Breakdown voltage model Termination
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参考文献8

  • 1BALIGA B J. Closed-form analytical solutions for the breakdown voltage of planar junctions terminated with a single floating field ring [J]. Solid-State Electronics, 1990, 33(5): 485-488.
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二级参考文献13

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共引文献7

同被引文献6

  • 1BALIGA B J. High-voltage device termination techniques., a comparative review [J]. IEE Proc I - Sol Sta : Elec Dev, 1982, 129(5): 173-179.
  • 2KRIZAJ D, AMON S, MINGUES C, et al. Spiral junction termination [J]. IEEE Trans Elec Dev, 1997, 44(11) : 2002-2010.
  • 3UDREA F, TRAJKOVIC T, THOMSON J, et al.Ultra-high voltage device termination using the 3D RESURF (super-junction) concept - experimental demonstration at 6. 5 kV[C] // ISPSD. Osaka, Japan. 2001: 129-132.
  • 4THEOLIER L, MAHFOZ-KOTB H, ISOIRD K, et al. A new junction termination technique., the deep trench termination (DT2) [C] // ISPSD. Barcelona, Spain. 2009: 176-179.
  • 5HONDA S, FUJII R, KAWAKAMI T, et al. A concept of a novel edge termination technique., junction termination (RJT) [C] //ISPSD. Hiroshima, Japan. 2010: 111-114.
  • 6宋文斌,蔡小五.一种新型高压功率器件终端技术[J].微电子学,2011,41(4):567-569. 被引量:13

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