单轴气浮台低速自由转动规律分析

The regularity analysis of low velocity free rotation of single axis air bearing table

根据单轴气浮台的结构及工作原理,通过对单轴气浮台核心部件静压气体轴承摩擦力矩和功率的分析,得出单轴气浮台的摩擦力矩和功率;在此基础上推导出单轴气浮台在不计外界空气阻尼条件下的低速自由转动规律,即单轴气浮台旋转的角速度及转速是一个随时间衰减的单指数函数;并通过运用Matlab曲线拟合工具箱将实验采集到的离散数据进行曲线拟合,结果表明:拟合曲线完全符合单轴气浮台低速自由转动规律.该规律对单轴气浮台的设计有一定的参考价值.

According to structure and working principle of single axis air bearing table and through analyzing the friction torque and power of the core component of single axis air bearing table--externally pressurized gas bearing, the friction torque and power of single axis air bearing table were obtained. Based on this, low velocity free rotation regularity of the single axis air bearing table were derived under the condition of ignoring external air damp, that was the angular velocity and speed of single axis air bearing table each was a single exponential function which decayed with time. By using Matlab curve fitting toolbox curve fitting of discrete data which is collected by experiment is carried out and the result shows that fitting curve completely conforms to the regularity of low velocity free rotation of single axis air bearing table. Therefore the regularity is a valuable reference for reliability design of single axis air bearing table.