摘要
本文介绍了压电薄膜检测的激光超声系统对ＣＶＤ金刚石膜声速测量的原理及方法。利用反射回波法对二块金刚石膜试样的纵波声速的测量结果为（２．０１０±０．０１４）×１０４ｍ／ｓ，证实了ＣＶＤ金刚石膜的高声速特性。
The principle and method of measuring the acoustic speed CVD diamond film with piezoelectric film detecting laser ultrasonic system are presented.By measuring the transit time between successive echoes in diamond film,the longitudinal wave velocity of two CVD diamond films is determined,which is(2.010±0.014)×10 4m/s.It is shown that the acoustic velocity of CVD diamond is very high.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
1998年第2期132-136,共5页
Journal of Synthetic Crystals
基金
国家自然科学基金
