摘要
利用压电薄膜的低温沉积工艺与微机械加工技术结合可以制作出压电微电机。这种压电微电机在医用微型器械，自聚焦系统，精密微定位、微型机器人等领域有着重要应用。本文介绍了几种压电微电机的制作过程、结构、工作原理及有关结果，并指出了目前存在的问题和下一步研究发展的方向。
Piezoelectric thin film micromotor has important applications in some fields such as medicalused microdevices, micropositioning, microrobots. The fabricating procedure, structure, operating principle and some related results of several piezoelectric micromotors were introduced in this paper. The advantages of the piezoelectric micromotors over other types of micromotors were pointed out. Existing problems and future development were discussed.
出处
《微特电机》
北大核心
1998年第5期40-43,共4页
Small & Special Electrical Machines
关键词
压电薄膜
压电微电机
压电材料
微电机
电机
piezoelectric thin film piezoelectric micromotor micromachining technique
