应用纳米压痕法测试类金刚石薄膜的力学性能

Mechanical properties of diamond-like carbon thin films measured by nano indentation method

纳米压痕仪被称为材料机械性质微探针,它借助于加载-卸载过程中压痕对载荷和压入深度的敏感关系,使得测试始终在薄膜材料的弹性限度内,克服了维氏法和努氏法等传统方法引起压痕边缘模糊或者碎裂的缺点,从而正确地、可靠地测试出薄膜材料的硬度和弹性模量等纳米力学性能。试验用微波电子回旋共振等离子体增强化学气相沉积技术,在不同偏压条件下制备三种类金刚石薄膜(DLC膜),用纳米压痕仪测试不同载荷下薄膜的硬度和弹性模量值。试验结果表明,材料的纳米硬度和弹性模量随着载荷的增大而逐渐减小。

Nano-indentation instrument is called mechanical properties microprobe of materials. It allows us to test the thin films within the elastic limits of them by means of the indenter＇s load and depth sensing relatoinship. That overcomes the shortcomings of vague or crushed indentation＇s boundary resulted from the traditional measurement methods, eg. Vicker, Knoop test and so on, therefore the nano-mechanical properties such as hardness and elastic modulus can be accurately and reliably measured. Three pieces of DLC films were prepared with different bias conditions by MP ECR-CVD deposition method. The nano-hardness and elastic modulus of the DLC films were measured with nano-indenter under different load conditions. The results also show that the nano-hardness and the elastic modulus are gradually reduced with the increase of the load.