摘要
集成光学压力传感器利用幅度、相位、折射率分布、光程和光波极化方式的改变来感应外部压力。设计了基于MZI光波导的MOEMS压力传感器,探讨了工作原理,分析了弹性薄膜尺寸对应力的影响和波导中TE、TM模式的光对波导折射率的影响。通过设计弹性薄膜的尺寸(a=2 mm,b=1 mm,h=20μm)和选用波长为1.31μm的单模激光,得到传感器的灵敏度为1.84×10-2kPa,半波压力为85 kPa.
Integrated optical pressure sensors can utilize the changes to the amplitude, phase, refractive index profile, optical path length, or polarization of the lightwave by the external pressure. MOEMS pressure sensors based on MZI （ Mach-Zehnder Interferometer） waveguide was designed and the operation principle was presented. The stress influenced by the size of diaphragm and refractive index change affected by TE/TM modes were analyzed. Through the design of the size of diaphragm （ a = 2 mm, b = 1 mm, h = 20 μm） and selection of single-mode laser with a specific wavelength （ 1.31 μm） , the sensitivity of sensors is 1.84 × 10^-2（/kPa） and the half wave pressure is 85 kPa.
出处
《仪表技术与传感器》
CSCD
北大核心
2009年第12期4-6,共3页
Instrument Technique and Sensor
基金
国家高技术研究发展计划(863)(2009AA03Z413)
