参数化方法在微机械谐振器设计中的应用

Parameterization Design of the Duble-ended Tuning Fork Micro-resinators

从理论上分析了微机械音叉谐振器的机械力学特性,给出了活动梳齿的工作模态频率解析解,提供谐振器结构设计的依据。利用基于MAST语言实现的MEMS宏模块建立微谐振器系统级通用参数化仿真模型,为验证外围电路提供了基础。事例仿真结果与理论模态分析相一致,验证了模型的有效性。通过减少梁固接端弹性系数、合理安排激励电极能抑制一阶模态扰动。工作模态谐振频率对结构参数的敏感性分析为优化谐振器性能提供基础,使工作模态远离其它高阶模态。敏感性仿真表明在横向振动微谐振器中,工作模态谐振频率随梁长的增加而减小;随梁宽的增加而增大;结构层厚度对横向振动频率没有影响;梳齿部分所有参数的变化造成频率的相反变化。

According to the description of the dynamic of the double-ended tuning fork micro-resonators,the system level universal parameter model is built.The model is a micro model consisting of some sub-blocks based on MAST langue.It can verify the ability of the peripheral circuit and decrease computational cost obviously.The error between analytic result and simulation is acceptable（〈1%）.Appropriate parameter value is chosen based on mode analysis and structure sensitivity analysis so that the work resonant frequency can far from the higher order resonant frequency. Making use of the decreasing spring of the joint beam,symmetry electrode can restrain the lower order perturbation.It is discovered that the work resonant frequency lessens slightly as the length of the DETF beam increasing,but the opposite with the variation of its width and all parameters of the comb.The height of the DETF beam is unrelated to the work resonant frequency.