一种大范围高精度的光电测量装置研究

Study on Wide-range Device for High Precision Measurement

为解决大尺寸测量的环境性和高精度性的矛盾问题，介绍了一种可用于工业现场大尺寸零件精密测量的装置。该装置以双纵模热稳频He-Ne激光器为光源，其拍频频率约为729MHz，拍频波长约412mm；以拍频波长为测量基准，拍频波节点（过零点）为对准标志，用粗估的方法获取整数倍拍频半波长的长度，用组合于同一光路中的分系统激光干涉仪（分辨率为0．08μm）测量最邻近节点到被测点的尾数长度。测试表明，此装置具有很好的环境适应性和同类仪器中最高的频差稳定度。整个测量系统可在0～20m范围内工作。测量不确定度优于±30μm／10m。

To balance between environment and precision of large-scale metrology, a large- size measuring equipment that can be applied for industrial locales is introduced. The frequencystabilized He-Ne laser with thermoregulation is used as the light source, which has the beat frequency about 790MHz and beat wavelength λ=412μm. This length of integral multiple half beat wavelength is obtained by rough estimation. This mantissa length between the node and the close measuring point is measured with double frequency interferometer,which is combined in the same optical system. The test indicates that the device has a high environment adaptability and highest frequency difference stability among the same kind of great-size devices. The measuring accuracy is better than 30μm/10 m and the measuring range is 0-20 m.