基于非相干光反馈的表面轮廓测量仿真研究

Simulation analysis of surface imaging measurement based on incoherent optical feedback

对一种基于非相干光反馈的表面轮廓测量方法,对其进行了理论仿真研究。建立了基于非相干光反馈表面轮廓测量的系统模型,分析了不同反馈光耦合强度的输出特性,系统的稳定状态,注入电流对系统的影响,以及反馈强度和表面深度的关系结果证明该方法的可行性.研究结果对系统参数设计具有参考价值。

Surface imaging measurement based on incoherent optical feedback, a measuring method, was numerically studied. The system model which was used to analysis output characteristic with different optical feedback intensity, system stability, injection current infection and the relationship of the optical feedback intensity and the case depth was set up. The results have good maneuverability of surface imaging measurement, but also have significant reference value to design of the experiement.