摘要
利用等离子体化学气相沉积制备了ＳｎＯ２∶Ｓｂ导电薄膜。研究了膜电阻与沉积温度、电极间距及掺杂浓度间依存关系和薄膜阻温特性。测试了薄膜对ＮＯ２气体的气敏性，并进行了理论分析。
The SnO_2∶Sb thin film is prepared by plasma chemical vapour deposition(PCVO).The relationship between the resistance of film and processing parameters is also described.The Sensibility of the SnO_2∶Sb film to NO_2 gas is measured.All results are discussed.
出处
《仪表技术与传感器》
CSCD
北大核心
1998年第9期12-15,共4页
Instrument Technique and Sensor
