摘要
本文介绍一种新型的红外水份、薄膜厚度在线测试仪器。着重分析双光路、多光束、非球面聚光反射镜光路系统及其光学自补偿原理。阐述数据处理器的采样技术和软件工作站的引入。
The paper describes a new on-line analyzer of infrared moisture/film thickness. It analyses mainly an optical system with daul otpical channels、multiple beams and aspherical mirror which can gather the light.It also introduces an optical principle of auto-compensation. A sampling technology by microprocessor and a station where all calibrations data are held are presented in this paper.
出处
《仪表技术与传感器》
CSCD
北大核心
1998年第10期16-19,23,共5页
Instrument Technique and Sensor
关键词
红外水份仪
红外测厚仪
数据处理
红外测量
Infrared Moiature Gauge,Infrared Thickness Gauge,Daul Optical Channels,Multiple Beums,Data Processing.
