微型光机电系统

Micro Optical Electro-Mechanical Systems

微型电子机械系统（ＭＥＭＳ）与光器件融合于一体的微型光机电系统（ＭＯＥＭＳ）成为ＭＥＭＳ研究的一个重要方向，它将会给光器件的发展带来新的飞跃，而光系统因无需力的输出，正是ＭＥＭＳ的一个理想的应用领域。本文主要介绍几种有突破性的、具有可动部件的微型光机电系统，最后提出一种新型的微光学开关。

Micro Optical Electro Mechanical Systems(MOEMS) is a new field rising on recent years, which is the combination of Micro Electro Mechanical Systems(MEMS) with optical systems and brings many new opportunities for optical systems. It offers capabilities of not only miniaturization and integration of optical systems but also development new optical devices. Microoptical elements, micro movable structures, and micro actuators can be monolithically integrated using batch processing technologies. This paper introduces some recent advances in movable MOEMS, mainly in micromachined displays, micro free space optical benches, micro optical scanners, tunable wavelength devices. In addition, a novel design of a micro optical switch is discussed.