改性方法对氧化铟锡衬底表面形貌和化学组分的影响

Effect of Modification Methods on Surface Morphology and Chemical Composition of Indium-Tin-Oxide Surfaces

采用溶剂超声、酸、碱处理等方法对氧化铟锡衬底进行表面改性,研究了改性方法对衬底表面性质及其发光二极管器件性能的影响.实验结果表明:衬底表面性质跟改性方法密切相关,酸、碱处理更加有效降低了衬底表面粗糙度和碳污染,优化了衬底的表面形貌和化学组分.另外,器件性能也依赖于衬底表面改性方法,溶剂超声处理的器件存在有明显的电流异常行为,而酸、碱处理的器件表现为正常的二极管伏安特性,并且具有较小的驱动电压.

Three different processing techniques were utilized to modify the surfaces of indium-tin-oxide substrates,and the influence of treatment methods on the surface properties of the substrates were investigated by atomic force microscopy（AFM） and X-ray photoelectron spectroscopy（XPS）.Experimental results show that the surface properties of the substrates strongly depend on the surface treatment methods.Acid and base treatments optimize the surface properties of substrates since the treatments decrease the surface roughness and carbon content,and improve the surface stoichiometry.Furthermore,the light-emitting diodes with the differently treated substrates as electrodes were fabricated and characterized.We observe that the device performance is greatly influenced by the surface treatments on substrates.Acid and base treatments decrease driving voltage,eliminate current anomalies,and thereby improve the device performance of light-emitting diodes.