直线电机驱动系统及应用

Linear Motor Drive Systems and Its Applications

直线电机直接驱动系统具有结构简单、动态响应快、控制精度高等一系列优点,是理想的直线进给传动方式。叙述了直线电机驱动系统的研究现状、特点及驱动控制技术,直线电机驱动系统在精密运动控制领域的应用,尤其是在数控装备、半导体工业和纳米制造业以及城市轨道交通等方面的应用,并对其发展趋势方向进行了展望。

The direct drive system in linear motor has the advantages of simple structure, faster transient response and better control capabilities to make it an ideal transmission mode. This paper introduces the studying state for linear motor drive system, its features and drive control technology, also its application in the precision motion control, especially in the fields of NC technology and equipment, semiconductor industry, Nano manufacturing and urban rail transit technology. The development trends are also predicted here.