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A novel fabrication approach for an athermal arrayed-waveguide grating 被引量:1

A novel fabrication approach for an athermal arrayed-waveguide grating
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摘要 A novel method for fabricating an athermal AWG is proposed, using a unique apparatus for ITU-T center wavelength adjustment and optical coupling of two cut-parts. UV adhesive or sticky gel is applied into the gap between the cut-elements and the alignment base substrate by capillary infiltration. The spectrum profiles are almost the same as those of the original chip state, and no deterioration is observed resulting from athermalization. Flat-top athermal AWG modules of 100 GHz × 40 ch are fabricated. Over a temperature range of-40 to 85 ℃, the center wavelength shift is ±22 pm, and the insertion loss change is less than ±0.11 dB. A novel method for fabricating an athermal AWG is proposed, using a unique apparatus for ITU-T center wavelength adjustment and optical coupling of two cut-parts. UV adhesive or sticky gel is applied into the gap between the cut-elements and the alignment base substrate by capillary infiltration. The spectrum profiles are almost the same as those of the original chip state, and no deterioration is observed resulting from athermalization. Flat-top athermal AWG modules of 100 GHz × 40 ch are fabricated. Over a temperature range of-40 to 85 ℃, the center wavelength shift is ±22 pm, and the insertion loss change is less than ±0.11 dB.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2010年第1期39-41,共3页 半导体学报(英文版)
关键词 AWG optical waveguide filter planar lightwave circuit wavelength division multiplexing AWG optical waveguide filter planar lightwave circuit wavelength division multiplexing
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